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Scalable Grayscale Lithography on Any Material through Reactive Ion Etching
This invention is a new approach to grayscale lithography, enabling the direct fabrication of 3D features on a variety of materials without the need for photoresists. By leveraging two effects during reactive ion etching (RIE), the process provides precise control over the depth and profile of etched features, making it highly versatile for applications...
Published: 11/4/2024
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Inventor(s): Mohamed ElKabbash
Keywords(s):
Category(s): Technology Classifications > Imaging & Optics > Lens & System Design, Technology Classifications > Imaging & Optics > Materials & Fabrication
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Creation of Diffractive Lenses and Fresnel Zone Plates in Semiconductor Processes and their use for Spectral Filtering
This invention focuses on incorporating diffractive optical elements, like a Fresnel zone plate, into the semiconductor fabrication process, particularly in the back-end-of-line (BEOL) stage. By doing so, it enhances the functionality of semiconductor devices by enabling advanced imaging and spectroscopic capabilities directly on the chip. This approach...
Published: 10/22/2024
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Inventor(s): Mohamed ElKabbash
Keywords(s):
Category(s): Technology Classifications > Engineering & Physical Sciences > Semiconductors, Technology Classifications > Imaging & Optics > Lens & System Design, Technology Classifications > Imaging & Optics > Materials & Fabrication
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Metasurface Faraday Isolator
This technology is an ultrathin Faraday isolator that incorporates two novel features that enhance its electromagnetic isolation capability. The first is the incorporation of highly polarization-sensitive metasurfaces to allow it to achieve the necessary polarization rotation for isolation in relatively weak magnetic fields. The second is the usage...
Published: 10/22/2024
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Inventor(s): Mohamed ElKabbash
Keywords(s):
Category(s): Technology Classifications > Imaging & Optics > Lens & System Design, Technology Classifications > Imaging & Optics > Materials & Fabrication, Technology Classifications > Engineering & Physical Sciences > Photonics, Technology Classifications > Engineering & Physical Sciences > Quantum, Technology Classifications > Engineering & Physical Sciences > Communications & Networking > Optical
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Transparent Highly Ce3+-doped Boron-Aluminosilicate Glass for Advanced Photonic Applications
This invention is a highly stabilized trivalent cerium (Ce3+)-doped boron-aluminosilicate (BASL) glass created with the highest Ce3+ concentration among currently known glass materials. Analysis of Ce3+-doped BASL glass samples properties confirmed the absence of both strong concentration quenching and Ce3+ oxidation. This Ce3+-doped BASL glass has...
Published: 11/14/2024
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Inventor(s): Viktor Dubrovin
Keywords(s):
Category(s): Technology Classifications > Imaging & Optics > Materials & Fabrication, Technology Classifications > Engineering & Physical Sciences > Photonics
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Integrated Multi-Layer Lithography Method for Enhanced Resolution without Substrate Removal
This invention is a new lithographic technique for the enhancement of resolution using a multi-layer photoresist system. This new method avoids the need for substrate removal and allows for sequential patterning during multiple exposure processes. Without substrate removal, additional steps and realignment are unnecessary, thus expediting the process.
Background:...
Published: 9/16/2024
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Inventor(s): Mohamed ElKabbash
Keywords(s):
Category(s): Technology Classifications > Imaging & Optics > Materials & Fabrication, Technology Classifications > Engineering & Physical Sciences > Photonics
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Continuous Amplitude and Phase Modulation Using Rotary MEMS with Patterned Photonic Crystals and Metasurfaces
This technology uses photonic crystals on rotary microelectromechanical systems (MEMS) to achieve continuous amplitude and phase modulations in digital micromirror devices (DMDs) and other spatial light modulators (SLMs). By incorporating guided mode resonance (GMR) in photonic crystals and utilizing anisotropic and geometric phase metasurfaces, the...
Published: 9/16/2024
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Inventor(s): Mohamed ElKabbash
Keywords(s):
Category(s): Technology Classifications > Imaging & Optics > Lens & System Design, Technology Classifications > Imaging & Optics > Materials & Fabrication, Technology Classifications > Engineering & Physical Sciences > Photonics, Technology Classifications > Engineering & Physical Sciences > MEMS & Nanotechnology
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EUV-Compatible DMD Device Using Existing DMDs with Deposited EUV DBR Mirrors
This technology is a method of transforming standard digital micromirror devices (DMDs), which are compatible with visible and near-infrared light, into DMDs suitable for extreme ultraviolet (EUV) applications. This is done by depositing EUV-compatible mirrors onto each micromirror of a standard DMD. The resulting EUV-compatible DMD yields an efficient...
Published: 9/16/2024
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Inventor(s): Mohamed ElKabbash
Keywords(s):
Category(s): Technology Classifications > Imaging & Optics > Lens & System Design, Technology Classifications > Imaging & Optics > Materials & Fabrication, Technology Classifications > Engineering & Physical Sciences > Photonics, Technology Classifications > Engineering & Physical Sciences > MEMS & Nanotechnology
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High-Speed Modulation Using Photonic Crystals on Digital Micromirror Devices (DMDs)
This technology integrates photonic crystals into digital micromirror devices (DMDs). The photonic crystals are incorporated on the surface of the DMD mirror in such a way as to achieve guided mode resonance, creating resonance features that are highly sensitive to changes in the angle of incidence. This increased sensitivity to angle changes minimizes...
Published: 9/16/2024
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Inventor(s): Mohamed ElKabbash
Keywords(s):
Category(s): Technology Classifications > Imaging & Optics > Lens & System Design, Technology Classifications > Imaging & Optics > Materials & Fabrication, Technology Classifications > Engineering & Physical Sciences > Photonics, Technology Classifications > Engineering & Physical Sciences > Electronics > Data Storage, Technology Classifications > Imaging & Optics > Materials & Fabrication > Optical, EO & MO
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3D Printing Mirror (Radial Lithography Surface Figuring)
The technology enables less expensive fabrication of mirrors without compromising quality. This is done with a 3D printing technique that uses lasers and a rotating platform to craft the desired shape of the mirror. The new method can print mirrors that can be used in large-aperture telescope applications such as space telescopes. It can also fabricate...
Published: 8/6/2024
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Inventor(s): Heejoo Choi, Daewook Kim
Keywords(s):
Category(s): Technology Classifications > Imaging & Optics > Optical Fab / Metrology, Technology Classifications > Imaging & Optics > Materials & Fabrication, Technology Classifications > Imaging & Optics > Lens & System Design
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Heliostat Deflectometry
This invention is a novel heliostat metrology method to analyze and assess heliostat quality. This method is designed for use with large format meter-scale heliostat mirrors. Through the use of a unique modulation-free pattern approach, this metrology method can be used in outdoor environments. In the context of heliostats, deflectometry is employed...
Published: 8/5/2024
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Inventor(s): Daewook Kim, James Angel, Yiyang Huang
Keywords(s):
Category(s): Technology Classifications > Energy, Cleantech & Environmental > Renewable Energy > Solar/Photovoltaic, Technology Classifications > Energy, Cleantech & Environmental > Renewable Energy, Technology Classifications > Imaging & Optics > Lens & System Design, Technology Classifications > Imaging & Optics > Materials & Fabrication
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