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Micro-Torsion Balance

This technology is a new ultra-sensitive torsion balance device small enough to fit on a microchip which can be used to measure forces, gravity or acceleration with a high degree of resolution. Background: A torsion balance measures torque by monitoring the rotation of a test mass suspended from an elastic fiber acting as a torsion spring. To increase...

Published: 1/13/2025 | Inventor(s): Aman Rajendra Agrawal, Dalziel Wilson, Jon Pratt, Stephan Schlamminger

Keywords(s):

Category(s): Technology Classifications > Imaging & Optics > Sensors and Detection > Remote Sensing, Technology Classifications > Engineering & Physical Sciences > MEMS & Nanotechnology

Monolithic Membrane Optomechanical Sensor

This invention is a monolithic membrane optomechanical sensor, capable of achieving micro-g sensitivity for acceleration sensing in a monolithic, chip-scale platform. It consists of two membranes with differential stiffness on a single silicon chip. Due to the differential stiffness, both the membranes react differently to the actuating force. This...

Published: 1/13/2025 | Inventor(s): Aman Rajendra Agrawal, Dalziel Wilson

Keywords(s):

Category(s): Technology Classifications > Imaging & Optics > Sensors and Detection, Technology Classifications > Engineering & Physical Sciences > Devices & Instrumentation