Integrated CMOS Spectrometer: Revolutionizing Spectroscopy through In-Chip Diffusion Technology

This invention is a novel spectrometer design which integrates the diffusing component directly into a Complementary Metal-Oxide-Semiconductor (CMOS) sensor array, thereby enhancing compactness and manufacturing efficiency. The core innovation lies in repurposing one or more metal interconnects in the back end of the line of the CMOS chip to act as a diffuser. This method scatters incoming broadband light across the sensor array, enabling the spectrometer to decode the light's spectrum effectively. Key to this design is the high reproducibility and precision of CMOS foundry processes, which ensure that the diffusing characteristics of the metal interconnects are consistent across all manufactured chips. This consistency allows for a one-time calibration model that can be universally applied to all spectrometers produced, significantly streamlining the calibration process and ensuring uniform performance across devices.

Background: 
Diffusion-based computational spectrometers represent a novel approach in optical technology, where a diffusive optical element is used to scatter incoming broadband light across a sensor array. This method leverages the unique scattering properties of different wavelengths to create a distinct spatial distribution of light on the sensor, which, when analyzed through sophisticated computational algorithms, allows for the accurate reconstruction of the light's spectrum.

Applications: 

• Semiconductor manufacturing
• Healthcare / medical diagnostics
• Environmental monitoring
• Scientific and industrial equipment 
• Aerospace and defense
• Spectroscopy

Advantages: 

• Compact 
• Streamlined, consistent design
• High reproducibility
• Versatile use in a range of applications
• Cost effective