Patterned Metallization for Hybrid Metal-Semiconductor Mirror of High Reflectivity

Case ID:
UA17-092
Invention:

Researchers at the University of Arizona have designed a novel hybrid metal-semiconductor mirror for use with VECSELs. A novel method of deposition incorporating a patterned mask allows for the use of gold in conjunction with GaAs. The DBR thickness is reduced, as is the thermal impedance, resulting in high reflectivity and high gain.

 

Background: 
Vertical External Cavity Surface Emitting Lasers (VECSELs) typically have low gain that requires a highly reflective mirror of at least 99.9% reflectivity to be attached to the gain medium.  Most DBR mirrors used for this purpose have a large number of layered pairs of AlGaAs/AlA, and at longer wavelengths, the materials are changed to InP-based materials.  They are still thick and thus have high thermal impedance.

 

Advantages:

  • Reduced thermal impedance and higher gain
  • Increased power efficiency
  • Covers both the pump and the laser signal wavelengths


Applications:

  • High powered VECSELs
  • Spectroscopy
  • Microwave and Terahertz photonics
  • Medical imaging sources

Status: issued U.S. patent #11,283,241

Patent Information:
Contact For More Information:
Richard Weite
Senior Licensing Manager, College of Optical Sciences
The University of Arizona
RichardW@tla.arizona.edu
Lead Inventor(s):
Alexandre Laurain
Jerome Moloney
Patrick Gbele
Keywords: